AZOM

The Focused Ion Beam Revolution: How FIB Instruments Transformed Sample Preparation

In recent decades, the preparation of samples for transmission electron microscopes has transformed, thanks to the introduction of focused ion beam (FIB) instruments. Known as either single-beam or ...
Semiconductor Engineering

Detection Of Contaminants In Positive And Negative Ion Mode Using In-line SIMS With An Oxygen Primary Ion Beam

Utilizing Secondary Ion Mass Spectrometry (SIMS) for in-line metrology is a newly emerging method of process control that requires contamination-free measurements, enabling SIMS on product wafers.
Semiconductor Engineering

Laser-Focused Results: Improving EUV Line Edge Roughness With Ion Beam Etching

Extreme ultraviolet (EUV) lithography exposed resist patterns can exhibit excessive line edge roughness (LER) and line width roughness (LWR) due to random or shot noise. Increasing the EUV exposure ...
iaea.org

What you need to know about ion beams

Whether it is determining the origin of pollutants, characterizing contaminants in food, imaging individual biological cells or putting a date to historical objects, scientists use ion beams to help ...
AZOM

Using Focused Ion Beam Without Gallium For “Damage-Free” TEM Specimen Preparation

It has been over 30 years since the first focused ion beam was used to make a TEM specimen. FEI, a company that is now part of Thermo Fisher Scientific, has been an essential part of helping take ion ...